Hydrogen Chloride Compressor - Reliable China Suppliers and Factory for Corrosive Gas Handling Equipment
Advantages of Hydrogen Chloride Diaphragm Compressor
01
Absolute Sealing, Safe Zero Leakage
The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.
02
Ultra-High Gas Purity, No Contamination
During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.
Key Design Points for Hydrogen Chloride Diaphragm Compressor
01
Corrosion-Resistant Materials
All metal components in contact with hydrogen chloride, including the diaphragm chamber, cylinder head, gas valves, inlet/outlet piping, and flanges, must be made of corrosion-resistant alloys. The standard configuration is SS316L stainless steel, whose addition of molybdenum (Mo) significantly enhances resistance to chloride pitting and stress corrosion cracking (SCC). For applications with extremely high moisture content or harsh operating conditions, evaluation and selection of higher-grade nickel-based alloys are required.
02
Diaphragm Structural Reliability
As the core isolation component, the diaphragm must be made of a special alloy with excellent resistance to hydrogen chloride corrosion and high fatigue strength, such as Inconel 718. Advanced designs such as an embedded diaphragm head should be adopted structurally to simplify the sealing surfaces, reduce potential leakage points, and ensure sufficient cycle life. A diaphragm rupture alarm device must be provided; once the inner diaphragm is damaged, the system can promptly alarm and shut down safely.
03
Safety & Monitoring System
The compressor skid integrates a high-efficiency inlet separator to strictly remove liquid water and particulates from the gas. Controlling the inlet moisture content is key to preventing wet corrosion. All exposed parts shall undergo surface anti-corrosion treatment to resist atmospheric corrosion. The system is equipped with comprehensive monitoring of pressure, temperature, and oil pressure, along with interlock shutdown functions to ensure safe operation within set parameters.
Certificates
Model Selection
| Model G70Z/G95Z/G110Z/G130Z | Piston Stroke 70mm~130mm |
| Maximum Piston Force 10KN~30KN | Maximum Discharge Pressure 70Mpa |
| Flow Range 1~500Nm³/h | Motor Power 2.2KW~30KW |
| Crankshaft Speed 420rpm | Cooling Method Water Cooled/Air Cooled |
| Model G70V/G95V/G130V | Piston Stroke 70mm~130mm |
| Maximum Piston Force 10KN~30KN | Maximum Discharge Pressure 50Mpa |
| Flow Range 1~200Nm³/h | Motor Power 2.2KW~30KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled |
| Model G110L/G130L | Piston Stroke 110mm~130mm |
| Maximum Piston Force 20KN~40KN | Maximum Discharge Pressure 100Mpa |
| Flow Range 10~1000Nm³/h | Motor Power 7.5KW~90KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled |
| Model G110D/G130D/G150D/G180D/G182D/G210D | Piston Stroke 110mm~210mm |
| Maximum Piston Force 20KN~160KN | Maximum Discharge Pressure 100Mpa |
| Flow Range 30~2000Nm³/h | Motor Power 22KW~200KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled |
G
Diaphragm type compressor
Z
Piston stroke 70mm
5
Flow(Nm3/h)
0.5
Inlet pressure(barg)
8
Outlet pressure(barg)
| No. | Model | Cooling water | Flow | Inlet pressure | Outlet pressure | Dimensions L×W×H | Weight | Motor Power |
|---|---|---|---|---|---|---|---|---|
| (L/h) | (Nm³/h) | (MPa) | (MPa) | (≈mm) | (≈kg) | (kW) | ||
| 1 | GZ-5/0.5-8 | 500 | 5 | 0.05 | 0.8 | 1400×740×1240 | 700 | 2.2 |
| 2 | GZ-14/39-45 | 500 | 14 | 3.9 | 4.5 | 1000×460×1100 | 700 | 2.2 |
| 3 | GZ-60/30-40 | 500 | 60 | 3 | 4 | 1400×800×1300 | 750 | 3 |
| 4 | GV-11/1-25 | 500 | 11 | 0.1 | 2.5 | 1500×780×1080 | 850 | 4 |
| 5 | GV-12/2-150 | 1000 | 12 | 0.2 | 15 | 1600×776×1080 | 900 | 5.5 |
| 6 | GV-400/20-60 | 3000 | 400 | 2 | 6 | 2600×1800×1700 | 3000 | 30 |
| 7 | GL-140/0.5-1.5 | 2000 | 140 | 0.05 | 0.15 | 2600×1800×1700 | 3000 | 15 |
| 8 | GL-150/0.3-5 | 2000 | 150 | 0.03 | 0.5 | 3230×1770×2200 | 3000 | 18.5 |
| 9 | GL-60/0.05-4 | 4000 | 60 | 0.005 | 0.4 | 2800×1600×1800 | 3000 | 22 |
| 10 | GD-255/1.2-28 | 6000 | 255 | 0.12 | 2.8 | 3600×2200×1800 | 6000 | 55 |
| 11 | GD-280/0.25-10 | 8000 | 280 | 0.025 | 1 | 3800×2300×2000 | 4000 | 75 |
| 12 | GD-450/1-12 | 9000 | 450 | 0.1 | 1.2 | 3800×2300×2000 | 4000 | 90 |
The equipment size and weight are for reference only, and the final design shall prevail.
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Frequently Asked Questions
Why is a diaphragm compressor preferred for hydrogen chloride (HCl) gas?
Hydrogen chloride is highly corrosive and toxic. Diaphragm compressors feature static sealing with zero dynamic leakage points, ensuring absolute safety for operators and the environment by fundamentally preventing gas leaks.
How does the compressor maintain ultra-high gas purity for electronic-grade applications?
During compression, the HCl gas only contacts the specially treated metal diaphragms and corrosion-resistant wetted parts. This prevents any contamination from lubricating oil or sealing grease, making it ideal for electronic-grade high-purity gas (purity > 99.999%) used in semiconductor etching.
What materials are used to construct the diaphragm head and flow-wetted parts?
The standard configuration uses SS316L stainless steel, where the addition of molybdenum enhances resistance to pitting and stress corrosion cracking. For high-moisture or harsh conditions, higher-grade nickel-based alloys like Inconel 718 are used.
What integrated safety systems are included in the compressor skid?
The skid integrates an inlet separator to remove liquid water/particles, a diaphragm rupture alarm system for automatic shutdown if a diaphragm fails, and comprehensive monitoring sensors for pressure, temperature, and oil pressure.
What cooling methods are available for the different compressor models?
Depending on the chosen model (GZ, GV, GL, GD) and application requirements, both water-cooled and air-cooled methods are supported to keep the system operating within safe temperature parameters.
How can I understand the model naming code for selection?
The models are named systematically. For example, in "GZ-5/0.5-8", "G" stands for Diaphragm type compressor, "Z" indicates a 70mm piston stroke, "5" represents flow rate in Nm3/h, "0.5" is the inlet pressure in barg, and "8" is the outlet pressure in barg.