Hydrogen Chloride Compressor for High Purity Gas | China Suppliers & Factory Specializing in Corrosive Gas Handling
Advantages of Hydrogen Chloride Diaphragm Compressor
01
Absolute Sealing, Safe Zero Leakage
The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.
02
Ultra-High Gas Purity, No Contamination
During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.
Key Design Points for Hydrogen Chloride Diaphragm Compressor
01
Corrosion-Resistant Materials
All metal components in contact with hydrogen chloride (diaphragm chamber, cylinder head, gas valves, piping, and flanges) are made of corrosion-resistant alloys. Standard configuration is SS316L. Higher-grade nickel-based alloys are evaluated for high moisture or harsh operating conditions.
02
Diaphragm Reliability
The core isolation component is made of special alloys with high fatigue strength, such as Inconel 718. Features an embedded diaphragm head design to simplify sealing surfaces and reduce leakage points. Includes a diaphragm rupture alarm device for auto-shutdown.
03
Safety & Monitoring
The compressor skid integrates an inlet separator to remove liquid water and particulates. Equipped with comprehensive pressure, temperature, and oil pressure monitoring and interlock shutdown functions to ensure safe operation.
Certificate
MODEL SELECTION
ModelG70Z/G95Z/G110Z/G130Z
Piston Stroke70mm~130mm
Max Piston Force10KN~30KN
Max Discharge Pressure70Mpa
Flow Range1~500Nm³/h
Motor Power2.2KW~30KW
Crankshaft Speed420rpm
Cooling MethodWater Cooled/Air Cooled
ModelG70V/G95V/G130V
Piston Stroke70mm~130mm
Max Piston Force10KN~30KN
Max Discharge Pressure50Mpa
Flow Range1~200Nm³/h
Motor Power2.2KW~30KW
Crankshaft Speed420rpm
Cooling MethodWater-cooled / Air-cooled
ModelG110L/G130L
Piston Stroke110mm~130mm
Max Piston Force20KN~40KN
Max Discharge Pressure100Mpa
Flow Range10~1000Nm³/h
Motor Power7.5KW~90KW
Crankshaft Speed420rpm
Cooling MethodWater-cooled / Air-cooled
ModelG110D/G130D/G150D/G180D/G182D/G210D
Piston Stroke110mm~210mm
Max Piston Force20KN~160KN
Max Discharge Pressure100Mpa
Flow Range30~2000Nm³/h
Motor Power22KW~200KW
Crankshaft Speed420rpm
Cooling MethodWater-cooled / Air-cooled
Model Nomenclature Explanation
G
Diaphragm type compressor
Z
Piston stroke 70mm
5
Flow (Nm³/h)
0.5
Inlet pressure (barg)
8
Outlet pressure (barg)
| No. | Model | Cooling water | Flow | Inlet pressure | Outlet pressure | Dimensions L×W×H | Weight | Motor Power |
|---|---|---|---|---|---|---|---|---|
| (L/h) | (Nm³/h) | (MPa) | (MPa) | (≈mm) | (≈kg) | (kW) | ||
| 1 | GZ-5/0.5-8 | 500 | 5 | 0.05 | 0.8 | 1400×740×1240 | 700 | 2.2 |
| 2 | GZ-14/39-45 | 500 | 14 | 3.9 | 4.5 | 1000×460×1100 | 700 | 2.2 |
| 3 | GZ-60/30-40 | 500 | 60 | 3.9 | 4.0 | 1400×800×1300 | 750 | 3.0 |
| 4 | GV-11/1-25 | 500 | 11 | 0.1 | 2.5 | 1500×780×1080 | 850 | 4.0 |
| 5 | GV-12/2-150 | 1000 | 12 | 0.2 | 15.0 | 1600×776×1080 | 900 | 5.5 |
| 6 | GV-400/20-60 | 3000 | 400 | 2.0 | 6.0 | 2600×1800×1700 | 3000 | 30.0 |
| 7 | GL-140/0.5-1.5 | 2000 | 140 | 0.05 | 0.15 | 2600×1800×1700 | 3000 | 15.0 |
| 8 | GL-150/0.3-5 | 2000 | 150 | 0.03 | 0.5 | 3230×1770×2200 | 3000 | 18.5 |
| 9 | GL-60/0.05-4 | 4000 | 60 | 0.005 | 0.4 | 2800×1600×1800 | 3000 | 22.0 |
| 10 | GD-255/1.2-28 | 6000 | 255 | 0.12 | 2.8 | 3600×2200×1800 | 6000 | 55.0 |
| 11 | GD-280/0.25-10 | 8000 | 280 | 0.025 | 1.0 | 3800×2300×2000 | 4000 | 75.0 |
| 12 | GD-450/1-12 | 9000 | 450 | 0.1 | 1.2 | 3800×2300×2000 | 4000 | 90.0 |
The equipment size and weight are for reference only, and the final design shall prevail.
CASE STUDY
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Frequently Asked Questions
It features a static sealing design that completely encloses the gas within the diaphragm head chamber. Without dynamic sealing points, it fundamentally prevents any leakage of hydrogen chloride gas, safeguarding both operators and the environment.
The process gas strictly contacts only specially treated metal diaphragms and corrosion-resistant flow-wetted components. Since no lubricating oil or sealing grease is involved in the gas chamber, there is no risk of contamination, making it ideal for electronic-grade high-purity applications (>99.999%).
Standard configurations use SS316L stainless steel, where the addition of molybdenum enhances resistance to pitting and stress corrosion cracking. For highly critical or wet conditions, higher-grade nickel-based alloys and Inconel 718 diaphragms are utilized.
The compressor is equipped with a safety rupture alarm device. If the inner diaphragm fails, the safety system instantly detects the change in pressure, triggers an alarm, and automatically shuts down the system to prevent any gas leakage.
The compressor skid integrates a high-efficiency inlet separator to remove liquid water and particulates. It also includes comprehensive monitoring for gas pressure, system temperature, and oil pressure, linked directly with automatic interlock shutdown functions.
We offer four main series: GZ, GV, GL, and GD. They span across piston strokes of 70mm to 210mm, maximum discharge pressures up to 100 MPa, and flow rates ranging from 1 to 2000 Nm³/h to cover diverse industrial requirements.