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Hydrogen Chloride Compressor China Factory - Reliable Suppliers of Corrosion-Resistant HCl Gas Compressors for High Purity Applications

Introducing our specialized equipment for safely handling highly corrosive hydrogen chloride gas, manufactured in China. As a leading supplier with a state-of-the-art factory, we utilize corrosion-resistant materials and cutting-edge sealing technologies to ensure ultra-high gas purity and operational safety. Our equipment is designed to provide reliable support for the electronics industry and high-end chemical sector, making it the preferred choice for businesses seeking quality and durability. Trust our expertise as top suppliers in the market!

    Advantages of Hydrogen Chloride Diaphragm Compressor
    01
    Absolute Sealing, Safe Zero Leakage

    The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.

    02
    Ultra-High Gas Purity, No Contamination

    During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.

    Key Design Points for Hydrogen Chloride Diaphragm Compressor
    01
    Corrosion-Resistant Materials

    All metal components in contact with hydrogen chloride, including the diaphragm chamber, cylinder head, gas valves, inlet/outlet piping, and flanges, must be made of corrosion-resistant alloys. The standard configuration is SS316L stainless steel, whose addition of molybdenum (Mo) significantly enhances resistance to chloride pitting and stress corrosion cracking (SCC). For applications with extremely high moisture content or harsh operating conditions, evaluation and selection of higher-grade nickel-based alloys are required.

    02
    Diaphragm Reliability

    As the core isolation component, the diaphragm must be made of a special alloy with excellent resistance to hydrogen chloride corrosion and high fatigue strength, such as Inconel 718. Advanced designs such as an embedded diaphragm head should be adopted structurally to simplify the sealing surfaces, reduce potential leakage points, and ensure sufficient cycle life. A diaphragm rupture alarm device must be provided; once the inner diaphragm is damaged, the system can promptly alarm and shut down safely.

    03
    Safety & Monitoring

    The compressor skid integrates a high-efficiency inlet separator to strictly remove liquid water and particulates from the gas. Controlling the inlet moisture content is key to preventing wet corrosion. All exposed parts shall undergo surface anti-corrosion treatment to resist atmospheric corrosion. The system is equipped with comprehensive monitoring of pressure, temperature, and oil pressure, along with interlock shutdown functions to ensure safe operation within set parameters.

    Certificate
    Model Selection
    GZ Model
    Parameter Specification
    Model G70Z / G95Z / G110Z / G130Z
    Piston Stroke 70mm ~ 130mm
    Maximum Piston Force 10KN ~ 30KN
    Maximum Discharge Pressure 70Mpa
    Flow Range 1 ~ 500 Nm³/h
    Motor Power 2.2KW ~ 30KW
    Crankshaft Speed 420rpm
    Cooling Method Water Cooled / Air Cooled
    GV Model
    Parameter Specification
    Model G70V / G95V / G130V
    Piston Stroke 70mm ~ 130mm
    Maximum Piston Force 10KN ~ 30KN
    Maximum Discharge Pressure 50Mpa
    Flow Range 1 ~ 200 Nm³/h
    Motor Power 2.2KW ~ 30KW
    Crankshaft Speed 420rpm
    Cooling Method Water Cooled / Air Cooled
    GL Model
    Parameter Specification
    Model G110L / G130L
    Piston Stroke 110mm ~ 130mm
    Maximum Piston Force 20KN ~ 40KN
    Maximum Discharge Pressure 100Mpa
    Flow Range 10 ~ 1000 Nm³/h
    Motor Power 7.5KW ~ 90KW
    Crankshaft Speed 420rpm
    Cooling Method Water Cooled / Air Cooled
    GD Model
    Parameter Specification
    Model G110D / G130D / G150D / G180D / G182D / G210D
    Piston Stroke 110mm ~ 210mm
    Maximum Piston Force 20KN ~ 160KN
    Maximum Discharge Pressure 100Mpa
    Flow Range 30 ~ 2000 Nm³/h
    Motor Power 22KW ~ 200KW
    Crankshaft Speed 420rpm
    Cooling Method Water Cooled / Air Cooled
    Model Nomenclature Guide
    G Diaphragm type compressor
    Z Piston stroke 70mm
    5 Flow (Nm³/h)
    0.5 Inlet pressure (barg)
    8 Outlet pressure (barg)
    No. Model Cooling Water (L/h) Flow (Nm³/h) Inlet Pressure (MPa) Outlet Pressure (MPa) Dimensions L×W×H (≈mm) Weight (≈kg) Motor Power (kW)
    1 GZ-5/0.5-8 500 5 0.05 0.8 1400×740×1240 700 2.2
    2 GZ-14/39-45 500 14 3.9 4.5 1000×460×1100 700 2.2
    3 GZ-60/30-40 500 60 3.0 4.0 1400×800×1300 750 3.0
    4 GV-11/1-25 500 11 0.1 2.5 1500×780×1080 850 4.0
    5 GV-12/2-150 1000 12 0.2 15.0 1600×776×1080 900 5.5
    6 GV-400/20-60 3000 400 2.0 6.0 2600×1800×1700 3000 30.0
    7 GL-140/0.5-1.5 2000 140 0.05 0.15 2600×1800×1700 3000 15.0
    8 GL-150/0.3-5 2000 150 0.03 0.5 3230×1770×2200 3000 18.5
    9 GL-60/0.05-4 4000 60 0.005 0.4 2800×1600×1800 3000 22.0
    10 GD-255/1.2-28 6000 255 0.12 2.8 3600×2200×1800 6000 55.0
    11 GD-280/0.25-10 8000 280 0.025 1.0 3800×2300×2000 4000 75.0
    12 GD-450/1-12 9000 450 0.1 1.2 3800×2300×2000 4000 90.0

    Note: The equipment size and weight are for reference only, and the final design shall prevail.

    Case Study
    Russia Case Study
    Russia
    United States Case Study
    UNITED STATES
    Spain Case Study
    Spain
    Kazakhstan Case Study
    Kazakhstan
    Frequently Asked Questions
    The compressor utilizes a static sealing design that completely wraps the process gas inside the diaphragm head chamber. Without dynamic sealing points, it prevents any potential escape of hydrogen chloride gas, ensuring complete safety for operators and compliance with environmental regulations.
    Throughout the operation, the hydrogen chloride gas only contacts specially treated metal diaphragms and corrosion-resistant wetted parts. It does not mix with lubricating oil or sealing grease, maintaining ultra-high gas purity (>99.999%), which is essential for semiconductor etching applications.
    All components contacting the process gas are constructed from high-grade corrosion-resistant alloys. The standard choice is SS316L stainless steel containing molybdenum to combat chloride pitting and stress corrosion cracking. For high-moisture or extreme operating conditions, nickel-based alloys are evaluated and selected.
    The system integrates a diaphragm rupture alarm that triggers a safe shutdown if the inner diaphragm is damaged. Additionally, it features an inlet separator to extract moisture, alongside comprehensive pressure, temperature, and oil pressure monitoring with interlock safety shutdowns.
    These models differ in piston stroke (ranging from 70mm to 210mm), maximum discharge pressure (up to 100 MPa), flow capacity (1 to 2000 Nm³/h), and motor power (from 2.2kW to 200kW), enabling precise customization depending on operational demands.