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High-Purity Hydrogen Bromide Compressor.png
High-Purity Hydrogen Bromide Compressor.png

Hydrogen Bromide Compressor - High Purity & Safety Equipment from China Suppliers and Factory for Semiconductor Manufacturing

This high-performance equipment, specifically engineered for chip etching and cleaning processes in the electronics industry, is manufactured by top China suppliers. Utilizing oil-free compression technology and robust, corrosion-resistant materials like Hastelloy, it guarantees gas purity exceeding 99.999%, significantly reducing contamination and corrosion risks. The innovative static sealing structure and targeted optimization enhance compression efficiency and stability while ensuring leak-proof performance and an extended service life. Ideal for applications demanding the highest standards of purity and safety, this equipment is a perfect choice for semiconductor manufacturing and is sourced directly from reliable factories in China
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    Product Details

    Advantages of Hydrogen Bromide Diaphragm Compressor

    Advantage 01

    Absolutely Oil-Free and Zero Leakage Guarantee

    The unique metal diaphragm completely physically isolates the process gas from the hydraulic oil system, achieving 100% oil-free compression. The entire gas chamber adopts a static sealing structure, fundamentally eliminating the risk of hydrogen bromide gas leaking outward or external impurities penetrating inward, perfectly meeting the extremely high purity requirements of semiconductor etching and similar applications.

    Advantage 02

    Intrinsically Safe Corrosion-Resistant Platform

    All flow-wetted components can be manufactured from high-grade corrosion-resistant alloys. The gas only contacts carefully selected anti-corrosion surfaces, avoiding the complex corrosion and wear issues associated with dynamic seals in reciprocating compressors. This results in long equipment life and significantly extended maintenance intervals.

    Key Design Points for Hydrogen Bromide Diaphragm Compressor

    Design Point 01

    Full-Series Corrosion-Resistant Materials

    All components in contact with hydrogen bromide, including the diaphragm head, cylinder head, gas valves, internal piping, and flanges, must be made of materials resistant to hydrobromic acid corrosion. SS316L stainless steel is the basic choice. For extreme conditions with high moisture content or other oxidizing impurities, evaluation and upgrading to duplex stainless steel or nickel-based alloys are necessary. All stainless steel components must ensure sufficient corrosion allowance (typically not less than 2 mm) and undergo thorough degreasing, cleaning, and passivation treatment.

    Design Point 02

    Core Diaphragm & Rupture Monitoring

    The diaphragm is the core component for isolation and sealing. Materials with excellent corrosion resistance in hydrogen bromide environments and high fatigue strength, such as special alloys like Inconel 718, must be selected. A standard three-layer diaphragm structure with a diaphragm rupture alarm device is required. When the middle diaphragm ruptures, the pressure sensor immediately triggers an alarm for maintenance, while the outer diaphragm still ensures no gas leakage, providing dual safety protection.

    Design Point 03

    Integrated Safety Discharge & Monitoring

    Exhaust gas containing hydrogen bromide from the safety valve must never be discharged directly into the atmosphere or a flare; it must be directed to a dedicated caustic scrubber for neutralization treatment. A fixed hydrogen bromide gas detector probe shall be integrated into the compressor skid to monitor the ambient concentration in real-time and interlock with the ventilation system. Simultaneously, continuous monitoring of cooling water flow, oil pressure, and pressures and temperatures at each stage shall be conducted, with comprehensive alarm and shutdown interlock logic configured.

    Certificate

    EAC Certificate
    CE Certificate
    ISO Certificate
    ISO 2033 Certificate
    ATEX Certificate

    Model Selection

    GZ Diaphragm Compressor
    Model G70Z / G95Z / G110Z / G130Z
    Piston Stroke 70mm ~ 130mm
    Maximum Piston Force 10KN ~ 30KN
    Max Discharge Pressure 70 Mpa
    Flow Range 1 ~ 500 Nm³/h
    Motor Power 2.2KW ~ 30KW
    Crankshaft Speed 420 rpm
    Cooling Method Water Cooled / Air Cooled
    GV Diaphragm Compressor
    Model G70V / G95V / G130V
    Piston Stroke 70mm ~ 130mm
    Maximum Piston Force 10KN ~ 30KN
    Max Discharge Pressure 50 Mpa
    Flow Range 1 ~ 200 Nm³/h
    Motor Power 2.2KW ~ 30KW
    Crankshaft Speed 420 rpm
    Cooling Method Water Cooled / Air Cooled
    GL Diaphragm Compressor
    Model G110L / G130L
    Piston Stroke 110mm ~ 130mm
    Maximum Piston Force 20KN ~ 40KN
    Max Discharge Pressure 100 Mpa
    Flow Range 10 ~ 1000 Nm³/h
    Motor Power 7.5KW ~ 90KW
    Crankshaft Speed 420 rpm
    Cooling Method Water Cooled / Air Cooled
    GD Diaphragm Compressor
    Model G110D / G130D / G150D / G180D / G182D / G210D
    Piston Stroke 110mm ~ 210mm
    Maximum Piston Force 20KN ~ 160KN
    Max Discharge Pressure 100 Mpa
    Flow Range 30 ~ 2000 Nm³/h
    Motor Power 22KW ~ 200KW
    Crankshaft Speed 420 rpm
    Cooling Method Water Cooled / Air Cooled
    G
    Diaphragm type compressor
    Z
    Piston stroke 70mm
    30
    Flow (Nm³/h)
    5
    Inlet pressure (barg)
    10
    Outlet pressure (barg)
    No. Model Cooling Water Flow Inlet Pressure Outlet Pressure Dimensions Weight Motor Power
    (L/h) (Nm³/h) (MPa) (MPa) L×W×H (≈mm) (≈kg) (kW)
    1 GZ-30/5-10 500 30 0.5 1 1400×740×1330 700 3
    2 GZ-12/0.5-8 500 12 0.05 0.8 1500×760×1200 750 4
    3 GZ-30/0.15-5 1000 30 0.015 0.5 1200×900×1200 800 7.5
    4 GV-30/1-3 1000 30 0.1 0.3 1400×900×1200 900 7.5
    5 GV-120/3.5-12 2000 120 0.35 1.2 2030×1045×1700 2200 22
    6 GV-120/3.5-12 2000 120 0.35 1.2 2030×1045×1700 3000 22
    7 GL-30/21 4200 30 Atmospheric 2.1 2200×1700×1800 2600 11
    8 GL-60/0.05-4 4000 60 0.005 0.4 2400×1800×1600 3000 15
    9 GL-150/0.3-5 2000 150 0.03 0.5 3230×1770×2200 3000 18.5
    10 G130D-278/1.1-3 2000 278 0.11 0.3 3000×2000×1800 4000 22
    11 GD-600/1.5-5 5000 600 0.15 0.5 3500×2300×1800 4500 45
    12 GD-1306/6-12 8000 1306 0.6 1.2 3800×2300×1800 6000 75
    The equipment size and weight are for reference only, and the final design shall prevail.

    Case Study

    Diaphragm Compressor Project in Russia

    Russia

    Diaphragm Compressor Project in United States

    United States

    Diaphragm Compressor Project in Spain

    Spain

    Diaphragm Compressor Project in Kazakhstan

    Kazakhstan

    Frequently Asked Questions

    Why is a diaphragm compressor required for handling hydrogen bromide (HBr)?
    Hydrogen bromide is a highly toxic, corrosive, and valuable gas used in high-purity processes like semiconductor etching. Diaphragm compressors utilize a metallic diaphragm to completely isolate the gas chamber from the hydraulic systems, preventing any risk of gas contamination or leakages.
    How does the diaphragm rupture monitoring system protect the equipment?
    The compressor uses a specialized three-layer metal diaphragm system. In the event that the primary process-side or hydraulic-side layer ruptures, the internal pressure sensor immediately detects the change and triggers an automatic safety alarm, while the remaining intact layer continues to prevent any external leakage.
    What materials are used to prevent corrosion from hydrogen bromide?
    All components in contact with the process gas (flow-wetted parts) are made from corrosion-resistant alloys. Standard builds utilize SS316L stainless steel with a minimum 2mm corrosion allowance, which can be upgraded to duplex stainless steel or nickel-based alloys like Inconel 718 for highly demanding or humid environments.
    Are these diaphragm compressors completely oil-free?
    Yes. Because the process gas chamber is physically separated from the hydraulic oil system by static metal diaphragms, there is no contact between the lubricating oil and the hydrogen bromide gas, guaranteeing 100% oil-free compression.
    What cooling methods are supported for these compressors?
    Depending on site requirements, system specifications, and model size, the systems can be equipped with either water-cooled or air-cooled configurations to maintain optimal operating temperatures and ensure long-term reliability.
    How is emergency safety discharge handled?
    HBr cannot be released into the atmosphere. The safety valves are designed to route any exhaust gas directly to a dedicated caustic scrubber for neutralization. Additionally, integrated gas detectors on the skid interface with ventilation systems to ensure immediate shutdown and safety containment.