Hydrogen Chloride Compressor

Hydrogen chloride (HCl) is a colorless, intensely irritating, and highly corrosive gas. Its aqueous solution, hydrochloric acid, is severely corrosive to most metals. Being denser than air, it tends to accumulate in low-lying areas upon leakage, posing a risk of suffocation. As an important chemical raw material, high-purity hydrogen chloride is widely used in high-end fields such as semiconductor chip manufacturing, imposing stringent requirements on compressor purity and reliability. Therefore, selecting a compressor for hydrogen chloride must firmly adhere to the principles of "corrosion-resistant materials" and "absolute sealing," with targeted anti-corrosion design based on moisture content, while also meeting the sealing and safety requirements of the hydrogen explosion-proof level.

DIAPHRAGM COMPRESSOR

PISTON COMPRESSOR

Advantages of Hydrogen Chloride Diaphragm Compressor

01

Absolute Sealing, Safe Zero Leakage:

The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.
02

Ultra-High Gas Purity, No Contamination:

During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.

Key Design Points for Hydrogen Chloride Diaphragm Compressor

01

Full Corrosion-Resistant Materials for Diaphragm Head and Flow-Wetted Parts:

All metal components in contact with hydrogen chloride, including the diaphragm chamber, cylinder head, gas valves, inlet/outlet piping, and flanges, must be made of corrosion-resistant alloys. The standard configuration is SS316L stainless steel, whose addition of molybdenum (Mo) significantly enhances resistance to chloride pitting and stress corrosion cracking (SCC). For applications with extremely high moisture content or harsh operating conditions, evaluation and selection of higher-grade nickel-based alloys are required.
02

Diaphragm Material and Structural Reliability:

As the core isolation component, the diaphragm must be made of a special alloy with excellent resistance to hydrogen chloride corrosion and high fatigue strength, such as Inconel 718. Advanced designs such as an embedded diaphragm head should be adopted structurally to simplify the sealing surfaces, reduce potential leakage points, and ensure sufficient cycle life. A diaphragm rupture alarm device must be provided; once the inner diaphragm is damaged, the system can promptly alarm and shut down safely.
03

Integrated Safety and Monitoring System:

The compressor skid integrates a high-efficiency inlet separator to strictly remove liquid water and particulates from the gas. Controlling the inlet moisture content is key to preventing wet corrosion. All exposed parts shall undergo surface anti-corrosion treatment to resist atmospheric corrosion. The system is equipped with comprehensive monitoring of pressure, temperature, and oil pressure, along with interlock shutdown functions to ensure safe operation within set parameters.

Certificate

MODEL SELECTION

Model G70Z/G95Z/G110Z/G130Z	Piston Stroke 70mm~130mm	Maximum Piston Force 10KN~30KN
Maximum Discharge Pressure 70Mpa	Flow Range 1~500Nm³/h	Motor Power 2.2KW~30KW
Crankshaft Speed 420rpm	Cooling Method Water Cooled/Air Cooled

Model G70V/G95V/G130V	Piston Stroke 70mm~130mm	Maximum Piston Force 10KN~30KN
Maximum Discharge Pressure 50Mpa	Flow Range 1~200Nm³/h	Motor Power 2.2KW~30KW
Crankshaft Speed 420rpm	Cooling Method Water-cooled / Air-cooled

Model G110L/G130L	Piston Stroke 110mm~130mm	Maximum Piston Force 20KN~40KN
Maximum Discharge Pressure 100Mpa	Flow Range 10~1000Nm³/h	Motor Power 7.5KW~90KW
Crankshaft Speed 420rpm	Cooling Method Water-cooled / Air-cooled

Model G110D/G130D/G150D/ G180D/G182D/G210D	Piston Stroke 110mm~210mm	Maximum Piston Force 20KN~160KN
Maximum Discharge Pressure 100Mpa	Flow Range 30~2000Nm³/h	Motor Power 22KW~200KW
Crankshaft Speed 420rpm	Cooling Method Water-cooled / Air-cooled

Diaphragm type compressor

Piston stroke 70mm

Flow(Nm3/h)

0.5

Inlet pressure(barg)

Outlet pressure(barg)

No.	Model	Cooling water	Flow	Inlet pressure	Outlet pressure	Dimensions L×W×H	Weight	Motor Power
No.	Model	(L/h)	(Nm³/h)	(MPa)	(MPa)	(≈mm)	(≈kg)	(kW)
1	GZ-5/0.5-8	500	5	0.05	0.8	1400×740×1240	700	2.2
2	GZ-14/39-45	500	14	3.9	4.5	1000×460×1100	700	2.2
3	GZ-60/30-40	500	60	3	4	1400×800×1300	750	3
4	GV-11/1-25	500	11	0.1	2.5	1500×780×1080	850	4
5	GV-12/2-150	1000	12	0.2	15	1600×776×1080	900	5.5
6	GV-400/20-60	3000	400	2	6	2600×1800×1700	3000	30
7	GL-140/0.5-1.5	2000	140	0.05	0.15	2600×1800×1700	3000	15
8	GL-150/0.3-5	2000	150	0.03	0.5	3230×1770×2200	3000	18.5
9	GL-60/0.05-4	4000	60	0.005	0.4	2800×1600×1800	3000	22
10	GD-255/1.2-28	6000	255	0.12	2.8	3600×2200×1800	6000	55
11	GD-280/0.25-10	8000	280	0.025	1	3800×2300×2000	4000	75
12	GD-450/1-12	9000	450	0.1	1.2	3800×2300×2000	4000	90

The equipment size and weight are for reference only, and the final design shall prevail.

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CASE STUDY

Russia
UNITED STATES
Spain
Kazakhstan

Advantages of Hydrogen Chloride Reciprocating Compressor

01

Large Flow Capacity:

Reciprocating compressors offer technical and cost advantages in medium-to-high pressure and large-flow applications, meeting the demands of large-scale hydrogen chloride recovery, transportation, or process boosting in chemical plants.
02

Mature Technology and Maintainability:

As a conventional machine type, its technical principles are well-established, and the spare parts supply chain is relatively comprehensive. Through modular design, the inspection and replacement procedures for key wear parts are standardized, facilitating maintenance.

Key Design Points for Hydrogen Chloride Reciprocating Compressor

01

Comprehensive Material Upgrades and Special Treatments:

Cylinder/Cylinder Liner: Must use a stainless steel cylinder body or a carbon steel body lined with a 316L stainless steel cylinder liner to resist corrosion.

Piston Assembly: The piston body must be made of forged stainless steel (e.g., 304), and piston rings should use corrosion-resistant self-lubricating materials such as filled PTFE.

Piston Rod: This is the most critical weak point. The base material should be a precipitation-hardening stainless steel (e.g., 17-4PH), with its surface hardness strictly controlled within the range of HRC 37–41 to balance strength and resistance to sulfide stress corrosion cracking (SSC). The surface often requires a dense coating such as High Velocity Oxygen Fuel (HVOF) sprayed tungsten carbide to enhance wear and corrosion resistance.
02

Piston Rod Packing and Buffer Seal System:

A special corrosion-resistant packing combination must be used. A nitrogen buffer seal system must be designed, introducing clean nitrogen into the packing to form a gas barrier, effectively isolating and collecting any hydrogen chloride gas that may micro-leak along the piston rod, and directing it to a closed collection vessel or exhaust gas treatment system to prevent it from entering the crankcase or the atmosphere.
03

Stringent Cooling and Dehydration Pretreatment:

The cylinder cooling water temperature must be precisely controlled to ensure the cylinder wall temperature always remains above the gas dew point, preventing hydrogen chloride from condensing into hydrochloric acid and causing severe corrosion. A high-efficiency gas-liquid separator must be installed at the inlet, equipped with liquid level monitoring and automatic drain functions, to ensure the gas entering the compressor is as dry as possible.

Certificate

MODEL SELECTION

Z Type

V / W Type

M Type

D Type

Hydrogen Chloride Reciprocating Compressor

Piston stroke 80mm, 95mm	Piston force 10KN～25KN
Power 7.5KW-55KW	Number of cylinder banks 1/2
Crankshaft speed 740 rpm, 980 rpm	Number of compression stages 1/2/3/4
Drive mode Electric motor, diesel engine, natural gas engine

Piston stroke 92mm, 95mm, 105mm, 120mm	Piston force 25KN, 45KN, 65KN
Number of compression stages 1/2/3/4	Number of cylinder banks 2/3/4
Crankshaft speed 740 rpm, 980 rpm	Power 15KW-220KW
Drive mode Electric motor, diesel engine, natural gas engine

Piston stroke 92mm~315mm	Piston force 45KN~660KN
Number of compression stages 1/2/3/4	Number of cylinder banks 4
Crankshaft speed 300rpm~980rpm	Power 160KW-3000KW
Drive mode Electric motor, diesel engine, natural gas engine

Piston stroke 92mm~315mm	Piston force 25KN~200KN
Number of compression stages 1/2/3/4	Number of cylinder banks 2
Crankshaft speed 300rpm~980rpm	Power 30KW-1000KW
Drive mode Electric motor, diesel engine, natural gas engine

Vertical type

Oil-free / F: Air-cooled

0.8

Actual volume flow (m3/min)

Inlet pressure(barg)

Outlet pressre(barg)

Vertical type

Oil-free / F: Air-cooled

0.8

Actual volume flow (m3/min)

Inlet pressure(barg)

Outlet pressre(barg)

Vertical type

Oil-free / F: Air-cooled

0.8

Actual volume flow (m3/min)

Inlet pressure(barg)

Outlet pressre(barg)

Vertical type

Oil-free / F: Air-cooled

0.8

Actual volume flow (m3/min)

Inlet pressure(barg)

Outlet pressure(barg)

S/N	Model	Flow	Inlet pressure	Outlet pressure	Motor power
S/N	Model	(Nm³/h)	(Mpa)	(MPa)	(kW)
1	ZW-0.8/2-16	120	0.2	1.6	15
2	ZW-0.85/0.16-16	50	0.016	1.6	11
3	ZW-0.4/2-40	60	0.2	4	11
4	VW-7/1-45	700	0.1	4.5	135
5	VW-5/1-45	500	0.1	4.5	90
6	VW-5.5/4.5	280	0	0.45	110
7	DW-0.92/16-45	800	1.6	4.5	75
8	DW-6.7/2-25	1020	0.2	2.5	75
9	DW-3.0/3-50	500	0.3	5	110
10	MW-154/6	10500	0.05	0.6	1100
11	MW-6/15-21	6000	1.5-2.0	2.1	185
12	M-40/3-7	9000	0.3	0.7	450