High-Performance Hydrogen Chloride Compressor: Trusted China Suppliers & Factory for Corrosive Gas Solutions
Advantages of Hydrogen Chloride Diaphragm Compressor
01
Absolute Sealing, Safe Zero Leakage
The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.
02
Ultra-High Gas Purity, No Contamination
During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.
Key Design Points for Hydrogen Chloride Diaphragm Compressor
01
Full Corrosion-Resistant Materials
All metal components in contact with hydrogen chloride, including the diaphragm chamber, cylinder head, gas valves, inlet/outlet piping, and flanges, must be made of corrosion-resistant alloys. The standard configuration is SS316L stainless steel, whose addition of molybdenum (Mo) significantly enhances resistance to chloride pitting and stress corrosion cracking (SCC). For applications with extremely high moisture content or harsh operating conditions, evaluation and selection of higher-grade nickel-based alloys are required.
02
Diaphragm Reliability
As the core isolation component, the diaphragm must be made of a special alloy with excellent resistance to hydrogen chloride corrosion and high fatigue strength, such as Inconel 718. Advanced designs such as an embedded diaphragm head should be adopted structurally to simplify the sealing surfaces, reduce potential leakage points, and ensure sufficient cycle life. A diaphragm rupture alarm device must be provided; once the inner diaphragm is damaged, the system can promptly alarm and shut down safely.
03
Integrated Safety System
The compressor skid integrates a high-efficiency inlet separator to strictly remove liquid water and particulates from the gas. Controlling the inlet moisture content is key to preventing wet corrosion. All exposed parts shall undergo surface anti-corrosion treatment to resist atmospheric corrosion. The system is equipped with comprehensive monitoring of pressure, temperature, and oil pressure, along with interlock shutdown functions to ensure safe operation within set parameters.
Certificate
Model Selection
| ModelG70Z/G95Z/G110Z/G130Z | Piston Stroke70mm~130mm |
| Maximum Piston Force10KN~30KN | Maximum Discharge Pressure70Mpa |
| Flow Range1~500Nm³/h | Motor Power2.2KW~30KW |
| Crankshaft Speed420rpm | Cooling MethodWater Cooled/Air Cooled |
| ModelG70V/G95V/G130V | Piston Stroke70mm~130mm |
| Maximum Piston Force10KN~30KN | Maximum Discharge Pressure50Mpa |
| Flow Range1~200Nm³/h | Motor Power2.2KW~30KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
| ModelG110L/G130L | Piston Stroke110mm~130mm |
| Maximum Piston Force20KN~40KN | Maximum Discharge Pressure100Mpa |
| Flow Range10~1000Nm³/h | Motor Power7.5KW~90KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
| ModelG110D/G130D/G150D/G180D/G182D/G210D | Piston Stroke110mm~210mm |
| Maximum Piston Force20KN~160KN | Maximum Discharge Pressure100Mpa |
| Flow Range30~2000Nm³/h | Motor Power22KW~200KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
G
Diaphragm type compressor
Z
Piston stroke 70mm
5
Flow(Nm3/h)
0.5
Inlet pressure(barg)
8
Outlet pressure(barg)
| No. | Model | Cooling water | Flow | Inlet pressure | Outlet pressure | Dimensions L×W×H | Weight | Motor Power |
|---|---|---|---|---|---|---|---|---|
| (L/h) | (Nm³/h) | (MPa) | (MPa) | (≈mm) | (≈kg) | (kW) | ||
| 1 | GZ-5/0.5-8 | 500 | 5 | 0.05 | 0.8 | 1400×740×1240 | 700 | 2.2 |
| 2 | GZ-14/39-45 | 500 | 14 | 3.9 | 4.5 | 1000×460×1100 | 700 | 2.2 |
| 3 | GZ-60/30-40 | 500 | 60 | 3 | 4 | 1400×800×1300 | 750 | 3 |
| 4 | GV-11/1-25 | 500 | 11 | 0.1 | 2.5 | 1500×780×1080 | 850 | 4 |
| 5 | GV-12/2-150 | 1000 | 12 | 0.2 | 15 | 1600×776×1080 | 900 | 5.5 |
| 6 | GV-400/20-60 | 3000 | 400 | 2 | 6 | 2600×1800×1700 | 3000 | 30 |
| 7 | GL-140/0.5-1.5 | 2000 | 140 | 0.05 | 0.15 | 2600×1800×1700 | 3000 | 15 |
| 8 | GL-150/0.3-5 | 2000 | 150 | 0.03 | 0.5 | 3230×1770×2200 | 3000 | 18.5 |
| 9 | GL-60/0.05-4 | 4000 | 60 | 0.005 | 0.4 | 2800×1600×1800 | 3000 | 22 |
| 10 | GD-255/1.2-28 | 6000 | 255 | 0.12 | 2.8 | 3600×2200×1800 | 6000 | 55 |
| 11 | GD-280/0.25-10 | 8000 | 280 | 0.025 | 1 | 3800×2300×2000 | 4000 | 75 |
| 12 | GD-450/1-12 | 9000 | 450 | 0.1 | 1.2 | 3800×2300×2000 | 4000 | 90 |
The equipment size and weight are for reference only, and the final design shall prevail.
Case Study
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Frequently Asked Questions
Q1: Why is a diaphragm compressor preferred for handling Hydrogen Chloride (HCl) gas?
Hydrogen Chloride is highly toxic, corrosive, and hazardous. A diaphragm compressor features a static sealing design that completely encloses the gas within the diaphragm head chamber, eliminating dynamic sealing points. This guarantees safe, zero-leakage operation, protecting operators and the environment.
Q2: How does the compressor maintain ultra-high gas purity for electronic-grade applications?
Throughout the compression cycle, the process gas only contacts specially treated metal diaphragms and corrosion-resistant wetted parts. Because there is no contact with lubricating oil or sealing grease, the gas remains completely uncontaminated, making it ideal for semiconductor etching processes requiring purity levels above 99.999%.
Q3: What materials are used to prevent corrosion from Hydrogen Chloride?
All wetted components, including the diaphragm chamber, gas valves, and piping, are made of corrosion-resistant alloys. Standard builds utilize SS316L stainless steel (with molybdenum to resist pitting and SCC). For wet or extreme process conditions, higher-grade nickel-based alloys like Inconel 718 are selected.
Q4: How does the diaphragm rupture alarm system work?
The compressor uses a multi-layer metal diaphragm design. In the unlikely event that the inner diaphragm layer ruptures, the integrated sensor detects the pressure variance between the layers and triggers an automatic safety alarm, immediately shutting down the system to prevent any external gas leakage.
Q5: What are the main differences between the GZ, GV, GL, and GD compressor models?
The models vary based on piston stroke, discharge pressure limits, and flow capacities. GZ and GV models are designed for smaller flow ranges and lower power requirements, while GL and GD models handle larger flow rates (up to 2000 Nm³/h) and discharge pressures up to 100 MPa.
Q6: What cooling configurations are available for these compressors?
Depending on the specific installation environment and operational requirements, the compressors can be configured with either water-cooling or air-cooling systems to ensure stable heat dissipation during continuous operation.