High-Performance Hydrogen Chloride Compressor from China Suppliers and Factory for Electronic and Chemical Industries
Advantages of Hydrogen Chloride Diaphragm Compressor
01
Absolute Sealing, Safe Zero Leakage
The static sealing design completely encloses the gas within the diaphragm head chamber without any dynamic sealing points, fundamentally achieving zero leakage of hydrogen chloride gas. This greatly ensures operator safety and environmental friendliness, meeting the most stringent environmental and safety regulations.
02
Ultra-High Gas Purity, No Contamination
During the entire compression process, the process gas only contacts specially treated metal diaphragms and corrosion-resistant flow-wetted components, completely avoiding contamination from lubricating oil or sealing grease. This characteristic makes it ideal equipment for producing electronic-grade high-purity hydrogen chloride (purity > 99.999%) used in semiconductor etching processes, ensuring the quality of end products.
Key Design Points for Hydrogen Chloride Diaphragm Compressor
01
Corrosion-Resistant Materials
All metal components in contact with hydrogen chloride, including the diaphragm chamber, cylinder head, gas valves, inlet/outlet piping, and flanges, must be made of corrosion-resistant alloys. The standard configuration is SS316L stainless steel, whose addition of molybdenum (Mo) significantly enhances resistance to chloride pitting and stress corrosion cracking (SCC). For applications with extremely high moisture content or harsh operating conditions, evaluation and selection of higher-grade nickel-based alloys are required.
02
Structural Reliability
As the core isolation component, the diaphragm must be made of a special alloy with excellent resistance to hydrogen chloride corrosion and high fatigue strength, such as Inconel 718. Advanced designs such as an embedded diaphragm head should be adopted structurally to simplify the sealing surfaces, reduce potential leakage points, and ensure sufficient cycle life. A diaphragm rupture alarm device must be provided; once the inner diaphragm is damaged, the system can promptly alarm and shut down safely.
03
Integrated Safety & Monitoring
The compressor skid integrates a high-efficiency inlet separator to strictly remove liquid water and particulates from the gas. Controlling the inlet moisture content is key to preventing wet corrosion. All exposed parts shall undergo surface anti-corrosion treatment to resist atmospheric corrosion. The system is equipped with comprehensive monitoring of pressure, temperature, and oil pressure, along with interlock shutdown functions to ensure safe operation within set parameters.
Certificate
Model Selection
| ModelG70Z/G95Z/G110Z/G130Z | Piston Stroke70mm~130mm |
| Maximum Piston Force10KN~30KN | Maximum Discharge Pressure70Mpa |
| Flow Range1~500Nm³/h | Motor Power2.2KW~30KW |
| Crankshaft Speed420rpm | Cooling MethodWater Cooled/Air Cooled |
| ModelG70V/G95V/G130V | Piston Stroke70mm~130mm |
| Maximum Piston Force10KN~30KN | Maximum Discharge Pressure50Mpa |
| Flow Range1~200Nm³/h | Motor Power2.2KW~30KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
| ModelG110L/G130L | Piston Stroke110mm~130mm |
| Maximum Piston Force20KN~40KN | Maximum Discharge Pressure100Mpa |
| Flow Range10~1000Nm³/h | Motor Power7.5KW~90KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
| ModelG110D/G130D/G150D/G180D/G182D/G210D | Piston Stroke110mm~210mm |
| Maximum Piston Force20KN~160KN | Maximum Discharge Pressure100Mpa |
| Flow Range30~2000Nm³/h | Motor Power22KW~200KW |
| Crankshaft Speed420rpm | Cooling MethodWater-cooled / Air-cooled |
G
Diaphragm type compressor
Z
Piston stroke 70mm
5
Flow (Nm³/h)
0.5
Inlet pressure (barg)
8
Outlet pressure (barg)
| No. | Model | Cooling water | Flow | Inlet pressure | Outlet pressure | Dimensions L×W×H | Weight | Motor Power |
|---|---|---|---|---|---|---|---|---|
| (L/h) | (Nm³/h) | (MPa) | (MPa) | (≈mm) | (≈kg) | (kW) | ||
| 1 | GZ-5/0.5-8 | 500 | 5 | 0.05 | 0.8 | 1400×740×1240 | 700 | 2.2 |
| 2 | GZ-14/39-45 | 500 | 14 | 3.9 | 4.5 | 1000×460×1100 | 700 | 2.2 |
| 3 | GZ-60/30-40 | 500 | 60 | 3 | 4 | 1400×800×1300 | 750 | 3 |
| 4 | GV-11/1-25 | 500 | 11 | 0.1 | 2.5 | 1500×780×1080 | 850 | 4 |
| 5 | GV-12/2-150 | 1000 | 12 | 0.2 | 15 | 1600×776×1080 | 900 | 5.5 |
| 6 | GV-400/20-60 | 3000 | 400 | 2 | 6 | 2600×1800×1700 | 3000 | 30 |
| 7 | GL-140/0.5-1.5 | 2000 | 140 | 0.05 | 0.15 | 2600×1800×1700 | 3000 | 15 |
| 8 | GL-150/0.3-5 | 2000 | 150 | 0.03 | 0.5 | 3230×1770×2200 | 3000 | 18.5 |
| 9 | GL-60/0.05-4 | 4000 | 60 | 0.005 | 0.4 | 2800×1600×1800 | 3000 | 22 |
| 10 | GD-255/1.2-28 | 6000 | 255 | 0.12 | 2.8 | 3600×2200×1800 | 6000 | 55 |
| 11 | GD-280/0.25-10 | 8000 | 280 | 0.025 | 1 | 3800×2300×2000 | 4000 | 75 |
| 12 | GD-450/1-12 | 9000 | 450 | 0.1 | 1.2 | 3800×2300×2000 | 4000 | 90 |
The equipment size and weight are for reference only, and the final design shall prevail.
CASE STUDY
Russia
UNITED STATES
Spain
Kazakhstan
Frequently Asked Questions (FAQ)
Why is a diaphragm compressor required for handling Hydrogen Chloride (HCl) gas?
Hydrogen Chloride is highly toxic, corrosive, and hazardous. A diaphragm compressor features static sealing, which completely encloses the process gas and eliminates dynamic leak points, ensuring absolute safety for operators and the environment.
How does the compressor guarantee that the gas remains uncontaminated?
The process gas only comes into contact with the specially treated metal diaphragms and corrosion-resistant wetted components. Because there is no contact with lubricants or grease in the gas chamber, the gas purity remains ultra-high, making it ideal for electronic-grade applications (>99.999% purity).
What materials are used to construct the wetted parts of the compressor?
Standard configurations utilize SS316L stainless steel, which contains molybdenum (Mo) to resist pitting and stress corrosion. For high moisture levels or severe conditions, high-grade nickel-based alloys like Inconel 718 are used.
What happens if a diaphragm ruptures during compressor operation?
The system is equipped with an integrated diaphragm rupture alarm device. If the inner diaphragm fails, the alarm instantly triggers and initiates an automatic, safe interlock shutdown to prevent any gas leakage.
What cooling methods are available for these compressors?
Depending on the model, site conditions, and specific process requirements, both water-cooled and air-cooled options are available to maintain optimal operating temperatures.
How do I select the right model between GZ, GV, GL, and GD series?
Model selection depends on your project's flow requirements (ranging from 1 to 2000 Nm³/h), maximum discharge pressure (up to 100 MPa), and motor power availability. You can consult the model selection chart above or contact our technical support for customized configuration.