China Suppliers Factory: High-Purity Hydrogen Bromide Compressor for Semiconductor Manufacturing

The unique metal diaphragm completely physically isolates the process gas from the hydraulic oil system, achieving 100% oil-free compression. The entire gas chamber adopts a static sealing structure, fundamentally eliminating the risk of hydrogen bromide gas leaking outward or external impurities penetrating inward, perfectly meeting the extremely high purity requirements of semiconductor etching and similar applications.

All flow-wetted components can be manufactured from high-grade corrosion-resistant alloys. The gas only contacts carefully selected anti-corrosion surfaces, avoiding the complex corrosion and wear issues associated with dynamic seals in reciprocating compressors. This results in long equipment life and significantly extended maintenance intervals.

All components in contact with hydrogen bromide, including the diaphragm head, cylinder head, gas valves, internal piping, and flanges, must be made of materials resistant to hydrobromic acid corrosion. SS316L stainless steel is the basic choice. For extreme conditions with high moisture content or other oxidizing impurities, evaluation and upgrading to duplex stainless steel or nickel-based alloys are necessary. All stainless steel components must ensure sufficient corrosion allowance (typically not less than 2 mm) and undergo thorough degreasing, cleaning, and passivation treatment.

The diaphragm is the core component for isolation and sealing. Materials with excellent corrosion resistance in hydrogen bromide environments and high fatigue strength, such as special alloys like Inconel 718, must be selected. A standard three-layer diaphragm structure with a diaphragm rupture alarm device is required. When the middle diaphragm ruptures, the pressure sensor immediately triggers an alarm for maintenance, while the outer diaphragm still ensures no gas leakage, providing dual safety protection.

Exhaust gas containing hydrogen bromide from the safety valve must never be discharged directly into the atmosphere or a flare; it must be directed to a dedicated caustic scrubber for neutralization treatment. A fixed hydrogen bromide gas detector probe shall be integrated into the compressor skid to monitor the ambient concentration in real-time and interlock with the ventilation system. Simultaneously, continuous monitoring of cooling water flow, oil pressure, and pressures and temperatures at each stage shall be conducted, with comprehensive alarm and shutdown interlock logic configured.