China Helium Compressor Factory: Low-Leakage Solutions for Semiconductor and Cryogenic Applications by Leading Suppliers

The diaphragm compressor uses a metal diaphragm to completely physically isolate the hydraulic oil from the compressed gas, achieving absolutely no lubrication in the cylinder. This characteristic ensures that the helium is not contaminated by any oil during compression, maintaining an ultra-high purity of over 99.999%, fully meeting the stringent cleanliness requirements of the semiconductor, scientific research, and medical fields.

The gas is sealed within the chamber formed by the diaphragm and cylinder head, which is a static sealing structure that fundamentally prevents gas leakage. This is crucial for preventing the loss of expensive helium. Simultaneously, this compressor type offers a high single-stage compression ratio, enabling it to achieve discharge pressures up to 50 MPa or even higher with fewer stages, making it highly suitable for high-pressure helium filling and transportation.

Given helium's high adiabatic index and significant temperature rise during compression, the design must strictly control the single-stage compression ratio to prevent excessively high discharge temperatures that could affect equipment stability and diaphragm life. An efficient inter-stage cooling and final cooling system (water-cooled or forced air-cooled) must be provided to make the compression process as close to isothermal as possible, effectively controlling the temperature rise.

All flow-wetted components in contact with helium should be made of compatible materials such as high-quality stainless steel (e.g., 304, 316L). During manufacturing and assembly, these components must undergo strict degreasing, cleaning, and drying processes to eliminate any potential sources of contamination and ensure the initial purity of the gas.

A diaphragm rupture monitoring and alarm device must be installed to immediately alarm upon diaphragm failure, preventing oil-gas mixing. The system should be equipped with safety valves at each stage for overpressure protection.