China Helium Compressor Factory: High-Efficiency Solutions from Reliable Suppliers for Semiconductor and Cryogenic Applications
Advantages of Helium Diaphragm Compressor
01
100% Oil-Free and Ultimate Purity Retention
The diaphragm compressor uses a metal diaphragm to completely physically isolate the hydraulic oil from the compressed gas, achieving absolutely no lubrication in the cylinder. This characteristic ensures that the helium is not contaminated by any oil during compression, maintaining an ultra-high purity of over 99.999%, fully meeting the stringent cleanliness requirements of the semiconductor, scientific research, and medical fields.
02
Static Seal Zero Leakage and High-Pressure Capability
The gas is sealed within the chamber formed by the diaphragm and cylinder head, which is a static sealing structure that fundamentally prevents gas leakage. This is crucial for preventing the loss of expensive helium. Simultaneously, this compressor type offers a high single-stage compression ratio, enabling it to achieve discharge pressures up to 50 MPa or even higher with fewer stages, making it highly suitable for high-pressure helium filling and transportation.
Key Design Points for Helium Diaphragm Compressor
01
Strictly Control the Single-Stage Compression Ratio and Enhance Cooling
Given helium's high adiabatic index and significant temperature rise during compression, the design must strictly control the single-stage compression ratio to prevent excessively high discharge temperatures that could affect equipment stability and diaphragm life. An efficient inter-stage cooling and final cooling system (water-cooled or forced air-cooled) must be provided to make the compression process as close to isothermal as possible, effectively controlling the temperature rise.
02
Use Compatible Materials and High-Cleanliness Treatment
All flow-wetted components in contact with helium should be made of compatible materials such as high-quality stainless steel (e.g., 304, 316L). During manufacturing and assembly, these components must undergo strict degreasing, cleaning, and drying processes to eliminate any potential sources of contamination and ensure the initial purity of the gas.
03
Configure Multiple Safety and Purity Monitoring Systems
A diaphragm rupture monitoring and alarm device must be installed to immediately alarm upon diaphragm failure, preventing oil-gas mixing. The system should be equipped with safety valves at each stage for overpressure protection.
Certificate
Model Selection
| Model G70Z/G95Z/G110Z/G130Z | Piston Stroke 70mm~130mm | Maximum Piston Force 10KN~30KN |
| Maximum Discharge Pressure 70Mpa | Flow Range 1~500Nm³/h | Motor Power 2.2KW~30KW |
| Crankshaft Speed 420rpm | Cooling Method Water Cooled/Air Cooled | |
| Model G70V/G95V/G130V | Piston Stroke 70mm~130mm | Maximum Piston Force 10KN~30KN |
| Maximum Discharge Pressure 50Mpa | Flow Range 1~200Nm³/h | Motor Power 2.2KW~30KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled | |
| Model G110L/G130L | Piston Stroke 110mm~130mm | Maximum Piston Force 20KN~40KN |
| Maximum Discharge Pressure 100Mpa | Flow Range 10~1000Nm³/h | Motor Power 7.5KW~90KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled | |
| Model G110D/G130D/G150D/G180D/G182D/G210D | Piston Stroke 110mm~210mm | Maximum Piston Force 20KN~160KN |
| Maximum Discharge Pressure 100Mpa | Flow Range 30~2000Nm³/h | Motor Power 22KW~200KW |
| Crankshaft Speed 420rpm | Cooling Method Water-cooled / Air-cooled | |
G
Diaphragm type compressor
Z
Piston stroke 70mm
2
Flow(Nm3/h)
3
Inlet pressure(barg)
| No. | Model | Cooling water | Flow | Inlet pressure | Outlet pressure | Dimensions L×W×H | Weight | Motor Power |
|---|---|---|---|---|---|---|---|---|
| (L/h) | (Nm³/h) | (MPa) | (MPa) | (≈mm) | (≈kg) | (kW) | ||
| 1 | GZ-2/3 | 500 | 2 | Atmospheric | 0.3 | 1200×700×1100 | 0 | 2.2 |
| 2 | GZ-5/0.5-10 | 500 | 5 | 0.05 | 1 | 1400×740×1240 | 650 | 2.2 |
| 3 | GZ-5/13-200 | 500 | 5 | 1.3 | 20 | 1500×760×1200 | 750 | 4 |
| 4 | GV-8/8-160 | 500 | 8 | 0.8 | 16 | 1310×686×580 | 800 | 3 |
| 5 | GV-10/8-160 | 500 | 10 | 0.8~0.7 | 16 | 1200×600×1100 | 800 | 4 |
| 6 | GV-10/8-220 | 1000 | 10 | 0.8 | 22 | 1330×740×1080 | 800 | 11 |
| 7 | GL-10/160 | 1000 | 10 | Atmospheric | 16 | 2200×1200×1300 | 3000 | 7.5 |
| 8 | GL-25/15 | 1000 | 25 | Atmospheric | 1.5 | 2200×1200×1300 | 3000 | 7.5 |
| 9 | GL-20/12-160 | 1000 | 20 | 1.2 | 16 | 2200×1200×1300 | 3000 | 7.5 |
| 10 | GD-120/4-80 | 3000 | 120 | 0.4 | 8 | 3000×1600×1400 | 4000 | 30 |
| 11 | GD-130/0.98-11 | 3000 | 130 | 0.098 | 1.1 | 3000×1800×1600 | 4000 | 30 |
| 12 | GD-150/2-20 | 4000 | 150 | 0.2 | 2 | 3000×1800×1600 | 3800 | 37 |
The equipment size and weight are for reference only, and the final design shall prevail.
CASE STUDY
Russia
UNITED STATES
Spain
Kazakhstan
Frequently Asked Questions
Why is a diaphragm compressor ideal for helium applications?
A diaphragm compressor uses a flexible metal diaphragm to isolate the gas completely from the hydraulic oil system. This ensures 100% oil-free compression, which is crucial for retaining the ultra-high purity (99.999%+) required for helium in semiconductor manufacturing, scientific research, and medical applications.
How does the static sealing structure prevent helium leakage?
The process gas is completely sealed within a chamber formed by the diaphragm and the cylinder head. Because there are no dynamic seals (like piston rings or rod packings in contact with the gas), it provides a static sealing mechanism that prevents leakage of expensive helium gas.
Why is cooling so critical in helium compression?
Helium has a very high adiabatic index, which leads to a rapid temperature rise during compression. To protect the diaphragms and maintain system stability, the compressor design strictly limits the compression ratio per stage and utilizes high-efficiency inter-stage and final cooling systems.
What materials are used for components in contact with helium?
All flow-wetted components are manufactured from high-grade compatible materials, such as 304 or 316L stainless steel. These components undergo strict degreasing, cleaning, and drying protocols during assembly to prevent any contamination.
What safety mechanisms are built into these compressors?
Our compressors feature a diaphragm rupture detection and alarm system that triggers an immediate shutdown upon a diaphragm failure, protecting the process gas from oil contamination. Stage-by-stage safety valves are also installed for overpressure protection.